Double-axis high-frequency MEMS accelerometer (± 30g)


  • The first Russian MEMS-accelerometer based on innovation technology of deep etch;
  • Minimal size and weight characteristics;
  • High accuracy;
  • Reliability;
  • High resistance to damage effects (shock, vibration, speed-up and other hazards);
  • Wide range of measured speed-up, between +30g  and -30g;
  • Ultra-low energy consumption;
  • Reasonable price;
  • Ready for usage in different spheres.
Technical characteristics of MEMS accelerometer ±30g:
  • Range of measured speed-up±30g
  • Resolution    24 bit/ <2mg
  • Band pass, frequency range 0-80 Hz
  • Output signalanalogue/digital
  • Non-linearity    <1%
  • Process temperature -40... + 85°С
  • Storage temperature-55...+ 125°С
  • Shock     3000 g
  • Delicacy     63 Hz/g
  • MEMS sensor dimensions 15 х 15 mm
  • Weight    < 10 g
  • Source voltage 3,3 ±0,3 V
  • Current consumption <1 mA/21 mA
  • Output current 20 mA
  • Output voltage+2 V
MEMS accelerometer ±30g is made on deep reactive etch technology. With the help of such technology it is possible to get structures with high aspect resolution (correlation of structure width and its depth). High aspect structures correlation of accelerometers mechanical parts made on such technology provides high accuracy and linearity of measurements. 

Possibility of usage MEMS accelerometers in systems with proximity fuse of new generation.

Modern tendency in proximity fuse area is mechanical assemblies’ replacement (especially mechanical devices which work out time periods) by electronic blocks. For fuses of next generation it is required timing device with smaller sizes that provides more reliability than mechanical one.

Such timing devices must be constructed on MEMS accelerometers basis which have reasonable price and at the same time they are able to work out required forces and shifts at low energy consumption.

World tendencies in MEMS accelerometers application.

Speaking about highly productive application areas MEMS accelerometers are often joined in Inertial Measuring devices: usage as independent components.
Most popular spheres of application:
  • blood pressure control and other health monitoring
  • dip survey for measuring devices 
  • medical implants: heart pacemaker, defibrillators, neuro-stimulators
  • seismic sensors
  • delivery control
  • vibration control: structural condition control 
  • vibration control: manufacturing process control

Joint with gyroscopes in IMU.

Application areas:
  • airplanes reserved devices
  • measuring devices in cabins, AHRS
  • rackets
  • poise control in trains and railway maintenance  
  • antenna stability
  • agriculture
  • armored vehicles
  • map-making instruments
  • military education systems 
  • navigational accuracy
  • remote controlled devices stabilization
  • unmanned aerial vehicles
  • transport dynamic tests
  • cranes
  • firefighter and police management and tracking
  • science and virtual reality
  • helicopter models and other high quality toys
  • people finding 
  • physical activity control 
  • robotics accuracy
  • soldiers navigation
  • unmanned ground vehicles (UGV)

Small-sized inertial navigation systems. 

MEMS accelerometers (along with other components) are successfully used in Small-sized inertial navigation systems.

Such systems provide:
  • minimum size and weight characteristics and thus fuel, materials saving and increasing of flying object working capacity;
  • low expenses for management system energy supplying;
  • end product cost reducing with increasing of its competitive ability at global market;
  • independence, interference protection, accuracy and flexibility in use;
  • forming of navigation parameters including high-speed and highly maneuvered objects within unlimited range of orientation angles and release information to the consumer in digital form;
  • integration with any receivers of satellite navigation systems GPS-GLONASS.

Comparison of Sovtest ATE accelerometer and other manufacturers’ products. 

Nowadays at global market there are no such accelerometers which have at ones wide range of speed-up measures, high accuracy, reliability and possibility to measure speed-up along several axes simultaneously.  

New Sovtest ATE accelerometer answers all the requirements mentioned above and turns up a unique product having no analogues at global market.

Below there is comparison of Sovtest ATE double-axis accelerometer and accelerometer of Colibrys (Sweden). From the data in the table it is obvious that having similar technical characteristics Colibrys accelerometer has possibility to measure speed-up only along one axis while Sovtest ATE accelerometer carries out measurements along 2 axes. This is the primary advantage of home produced MEMS accelerator over the foreign one.

Comparison of accelerators with maximum speed-up measurement range ±30 g

Technical characteristics

Sovtest ATE

Colibrys VS9030.D

Range of speed-up measures



24 bit/ <2 mg

<1.7 mg

Band pass, frequency range

0-80 Hz

0-1000 Hz

in mode exit time


1 ms

Output signal

analog/ digital




<0.8% FC

Process temperature

-40 ... + 850С

-55... + 1250С

Storage temperature

-55... + 1250С

Resistance to vibrations


20 g, 20-2000 Hz


3000 g

6000 g



MEMS sensor dimensions and IS (FR4)

15x15 mm

8.9х8.9 mm


<10 g

<1.5 g

Source voltage

3.3±0.3 V

2.5±5.5 V

Current consumption

<1 mA<21 mA

<0.4 mA

Output current

20 mA

<1.5 mA

Output voltage

2 V

0.5-4.5 V

Number of axes



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